Electronic ultrapure water equipment process description
The application range of electronic ultra-pure water equipment is ultra-pure water for semiconductor industry, color kinescope, integrated circuit, fine chemical industry, and high-purity water for laboratory. Semiconductors, integrated circuit chips and packaging, liquid crystal displays, high-precision circuit boards, optoelectronic devices, various electronic devices, microelectronics industry, large-scale and ultra-large-scale integrated circuits require a large amount of pure water, and use high-purity water and ultra-pure water to clean Semi-finished products and finished products. The higher the integration of integrated circuits, the narrower the line width, the higher the requirements for water quality. At present, the Ministry of Electronic Industry of China divides electronic water quality technology into five industry levels, namely 18mΩ. Centimeters, 15 megohms. Centimeters, 10 megohms. Centimeters, 2m Ω. cm and 0.5 mΩ. Cm, in order to distinguish between different water quality.
The preparation process of ultrapure water for electronic industry is introduced. The preparation process of ultrapure water for electronic industry is roughly divided into the following three categories:
- A method for preparing ultrapure water for electronic industry by combining reverse osmosis water treatment equipment with ion exchange equipment. The basic process flow is: raw water → multimedia filter → activated carbon filter → precision filter → intermediate water tank → reverse osmosis equipment → mixed bed (double bed) → ultra-pure water tank → ultra-pure water pump → rear safety filter → water point.
(2) The traditional water treatment method for preparing ultrapure water for electronic industry with ion exchange resin is: raw water → multimedia filter → activated carbon filter → precision filter → intermediate water tank → cation bed → negative ion bed → mixed bed (double bed) → ultrapure water tank → ultrapure water pump → rear safety filter → water point.
(3) Using reverse osmosis equipment and electrodeionization (EDI) technology, this equipment is used to prepare ultrapure water for the electronic industry. This is the latest process for preparing ultrapure water. This is also an environmentally friendly, economical and potential ultra-pure water preparation process. The basic process is: raw water → multimedia filter → activated carbon filter → precision filter → intermediate water tank → reverse osmosis equipment → electrodeionization (EDI)→ ultra-pure water tank → ultra-pure water pump → rear safety filter → water point.
Ultra-pure water equipment in the electronics industry is usually composed of multi-media filter, activated carbon filter, sodium ion softener and precision filter pretreatment system, RO reverse osmosis host system and ion exchange mixed bed (EDI electric desalination system) system constitute the main equipment system. The original water tank, intermediate water tank, RO pure water tank and ultra-pure water tank are provided with liquid level control system, and high and low pressure water pumps are provided with high and low pressure protection devices. Online water quality detection and control instruments and PLC programmable controller are used for power supply to truly realize unattended operation. At the same time, the method of combining recommendation with customer requirements is adopted in the selection of process materials. Compared with other similar products, the equipment has higher cost performance and equipment reliability.
